This closed loop system was designed to allow the customer to monitor both position and force simultaneously and adjust accordingly in three axis of motion (XYZ). It was designed to operate in an upside down orientation, but can easily operate when right side up. This allows for simultaneous position and force monitoring which can adjust accordingly in three axis of motion (XYZ). It was designed to operate in an inverted orientation. This low profile XYZ-Force positioning stage design is comprised of a SRS-002-003/002-003-01-XY single rail positioning stage (horizontal XY-axis) with a mounted VMS06-008-LB-01 voice coil positioning stage (vertical Z-axis).
The bottom axis use brushless linear motors that generate a continuous/peak force of 3.1 lbs [13.8 N]/9.4 lbs [41.8 N] (bottom axis), 3.1 lbs [13.8 N]/9.4 lbs [41.8 N] (top axis), with a total stroke length of 1.8 in [45.7 mm] (bottom axis), 1.8 in [45.7 mm] (top axis). The top axis is able to directly mount to the moving bottom axis motor. This helps reduce the overall height and moving mass of the system. The non-contact 1.0-micron resolution encoder allows for precise positioning. It is guided by a rigid recirculating ball linear bearing. It has end-of-travel bumper stops. The vertical axis voice coil motor generates a continuous/peak force of 1.12 lbs [5.0 N]/3.36 lbs [15.0 N] with a total stroke length of 0.60 in [15.2 mm]. The 1.0-micron resolution encoder allows for precise positioning. It comes supplied with a sliding contact linear bearing. The motor shaft is the moving part of the assembly so that there are no moving (flexing) cables in the system. This also reduces the moving mass of the system. The 6-axis force transducer provides force and torque feedback for XYZ-axis of motion.
- Ultra High Vacuum (UHF) compatible
- No moving (flexing) cables
- Compact size
- Low profile
- Three axis motion control
- Dual feedback